While a conventional closed electron hall drift ion source has a cylindrical shape for an efficient trapped electron motion along a ceramic channel, 300-600 mm wide horse-track shaped linear type ion source is newly developed. With electromagnetic winding coil, magnetic field of discharge region is optimized by magnetic field simulation code. Argon ion beam current density is measured more than 0.2 mA/cm² and is saturated at discharge voltage higher than 280 V. This linear ion source is adopted in vacuum roll-to-roll coater and used for surface modification of polyimide (PI) and polyvinylidenefluoride (PVDF). The wetting angle of PI and PVDF surface was suddenly decreased below 5 degree with the irradiation of Ar⁺ and O₂⁺ ion at the very low ion fluence less than 1x10¹⁶/cm². After ion beam irradiation, Cu and Ni-Cr thin film were successively deposited on modified PI for a flexible copper clad laminate (FCCL) and ITO was deposited on modified PVDF for flexible thin film speaker respectively. Peel strength of FCCL was about 0.4 kgf/cm after thermal test. OLED and polymer dispersed liquid crystal for flexible audible display and audible window were successfully fabricated on ITO/PVDF flexible substrate.
This work is supported by the Seoul R&BD program(10848)

Dong-Hee Park, Opto-electronic Materials Center, Korea Institute of Science and Technology, Seoul, Republic of Korea
Won-Kook Choi*, Opto-electronic Materials Center, Korea Institute of Science and Technology, Seoul, 

*presenting author