The influence of high power ion beam treatment on surface morphology of the magnesium, aluminium was investigated by scanning electron microscopy. The formation of periodical structure and  micro- and nanoparticles  on the surface of substrates was observed.  The spatial period this structure and sizes of micro- and nanoparticles formed in surface under irradiation high-power ion beam were determined.  Possible mechanisms of formation of periodical structure and  particles on the surface of substrate was discussed.