In late years, problems about final disposal of various plastics waste are pointed out. On the other hand, from the viewpoint of environmental protection, application of biodegradable plastic attracts attention as substitution material of general-purpose plastics used for basal plate material. However, the field of its application is limited because of it has weak-point, the low heat resistance and the high production cost etcetera. In conventional investigation, formation method of various metals thin film on the surface of biodegradable plastic plate used ion beam was established. Furthermore, requirement becomes alteration of thin film materials to reduce load to environment of the biodegradable plastic basal plate putting thin film. From the viewpoint of these, authors selected amorphous carbon for thin film material. By the way, content of hydrogen, inclusion ratio (sp³/sp²) of carbon linkage form have an influence on physical property and characteristic of amorphous carbon.

 In this work, LACEA ( Poly Lactic Acid: PLA) and BIONOLLE ( Poly Butylene Succinate: PBS) as substrate of biodegradable plastic and toluene, naphthalene and dodecane as assist gases were adopted. As a result, forming amorphous carbon nano thin film of toluene, naphthalene and dodecane gas were obtained. In addition, having tried function evaluation of the thin film, that amorphous carbon film on various biodegradable plastic basal plate had electrical resistivity equivalent to semiconductor field was confirmed.