We are developing the MEMS device forming using press forming system, however the decreasing size make toughness of punch tools comparable with stress of them[1].  Though, the life span of micro punch tools becomes shorter than requirement of manufactures.  We found a gold ion implantation and post anneal process increase the life span, but its reason was not so clear[2].  In this report, we make a novel press forming system that possible to observe the punch surface after every punching.   We prepare the special die system, which was designed for observe the punch surface and two CCD microscope cameras take photographs.  Gold ion implantation accelerated at 75 keV at doses 1x10¹⁶ cm^-2 were chosen and annealed at 700 K for 30 minutes after implantation.  The Co-WC punch surface was oxidized by this modification.  The punch makes 150 -µm holes which punched a 0.2 mm thick stainless spring steel (SUS-304 CSP-1/2H).    The result of this experiment, the punch shows two different types of damages that were a wear and an adhesion of stainless steel.   The gold ion implanted punch decreased the adhesion damage area.  We consider that the determent of adhesion of punch surface increase the life span of its. 

[1] M.yang, S.Nakano, K.Manabe, K.Morikawa, K.Ito, H.Saito, K.Fuchigami, T.Yokoi, N.Hotta, Proc. 1^st Int.Conf. New Forming Tech., (2004) 135 Harbin

[2] S.Nakano, K.Ito, M.Yang, M.Yoshida, H.Ogiso, Surf. Coat. Tech. 203 (2009) 2776