The influence of high power proton-carbon ion beam treatment on nanostructured materials (por-Si, nanoporous SiO₂, amorphous carbon films) was investigated by scanning electron and  atom force microscopies. The melting of nanoporous Si and SiO₂ under high-power ion beam (HPIB) irradiation of nanosecond duration was observed. The sizes of ellipsoidal particles formed in Si and those of holes formed in SiO₂ under irradiation were determined.  The possible origin of these morphology features was discussed. The influence of high power ion beam treatment on surface morphology and resistance of carbon films synthesized by PE CVD  was investigated also. Possible mechanisms of  surface morphology changes and increasing of carbon film resistance after irradiation was discussed.